APA
Madou M. J., . (2002). Fundamentals of Microfabrication: The Science of Miniaturization. New Delhi: CRC Press.
Chicago
Madou Marc J, . 2002. Fundamentals of Microfabrication: The Science of Miniaturization. New Delhi: CRC Press.
Harvard
Madou M. J., . (2002). Fundamentals of Microfabrication: The Science of Miniaturization. New Delhi: CRC Press.
MLA
Madou Marc J, . Fundamentals of Microfabrication: The Science of Miniaturization. New Delhi: CRC Press. 2002.