Science and Engineering of Microelectronic Fabrication (Record no. 16931)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00401nam a2200157Ia 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20251106132344.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 251106s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780195136050 |
| 040 ## - CATALOGING SOURCE | |
| Transcribing agency | nmit |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell, Stephen A |
| 245 #0 - TITLE STATEMENT | |
| Title | Science and Engineering of Microelectronic Fabrication |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2/e |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York |
| Name of publisher, distributor, etc. | OUP |
| Date of publication, distribution, etc. | 2005 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xii, 603 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Reference |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection | Home library | Current library | Date acquired | Source of acquisition | Cost, normal purchase price | Total checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| M.Tech-VLS | NMIT | NMIT | 2007-09-18 | SLBD/289/17.Sep.2007 | 335.00 | 621.395 CAM | 13847 | 2025-07-30 | 2025-07-30 | Reference |