| 000 | 00366nam a2200145Ia 4500 | ||
|---|---|---|---|
| 005 | 20250814115406.0 | ||
| 008 | 250729s9999 xx 000 0 und d | ||
| 020 | _a9780367147570 | ||
| 100 | _aLyshevski, Sergey Edward | ||
| 245 | 0 | _aNano and Micro-Electro Mechanical Systems | |
| 250 | _a2/e | ||
| 260 |
_aNew Delhi _bCRC Press _c2019 |
||
| 300 | _a722 | ||
| 942 | _cBK | ||
| 999 |
_c10959 _d10959 |
||