000 00330nam a2200133Ia 4500
005 20250626142643.0
008 241013s9999 xx 000 0 und d
020 _a9780071626231
100 _aLau, John H.
245 0 _aAdvanced MEMS packaging /
260 _aLondon
_bPenguin Books
_c1994
300 _a489
942 _cBK
999 _c12435
_d12435