| 000 | 00401nam a2200157Ia 4500 | ||
|---|---|---|---|
| 005 | 20251106132344.0 | ||
| 008 | 251106s9999 xx 000 0 und d | ||
| 020 | _a9780195136050 | ||
| 040 | _cnmit | ||
| 100 | _aCampbell, Stephen A | ||
| 245 | 0 | _aScience and Engineering of Microelectronic Fabrication | |
| 250 | _a2/e | ||
| 260 |
_aNew York _bOUP _c2005 |
||
| 300 | _axii, 603 | ||
| 942 |
_cREF _2ddc |
||
| 999 |
_c16931 _d16931 |
||