000 02941nam a22004575i 4500
001 978-0-387-26132-4
003 DE-He213
005 20201213203034.0
007 cr nn 008mamaa
008 100301s2007 xxu| s |||| 0|eng d
020 _a9780387261324
_9978-0-387-26132-4
024 7 _a10.1007/b136902
_2doi
050 4 _aTJ1-1570
072 7 _aTGB
_2bicssc
072 7 _aTEC009070
_2bisacsh
082 0 4 _a621
_223
100 1 _aJackson, Mark J.
_eauthor.
245 1 0 _aMicro and Nanomanufacturing
_h[electronic resource] /
_cby Mark J. Jackson.
264 1 _aBoston, MA :
_bSpringer US,
_c2007.
300 _aX, 699 p.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _aPrinciples of Micro- and Nanofabrication -- Microfabrication Using X- ray Lithography -- Manufacturing High Aspect Ratio Microstructures -- Meso-Micromachining -- Mechanical Micromachining -- Microgrinding -- Diamond Microcutting Tools -- Laser Micro- and Nanofabrication -- Micromachining Using Pulsed Water Droplets -- Diamond Nanogrinding -- Nanomachining -- Micro-and Nanomanufacturing.
520 _aNanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn: Manufacturing and fabrication at the micro and nanoscales Using bulk and surface micromachining techniques, LiGA and deep x-ray lithography to manufacture semiconductors Producing master molds with micromachining The deposition of thin films, pulsed water drop machining, and nanomachining Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.
650 0 _aEngineering.
650 0 _aMechanical engineering.
650 0 _aMachinery.
650 0 _aElectronics.
650 1 4 _aEngineering.
650 2 4 _aMechanical Engineering.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
650 2 4 _aManufacturing, Machines, Tools.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9780387258744
856 4 0 _uhttp://dx.doi.org/10.1007/b136902
912 _aZDB-2-ENG
950 _aEngineering (Springer-11647)
999 _c20017
_d20017