APA
Campbell S. A., . (2005). Science and Engineering of Microelectronic Fabrication. New York: OUP.
Chicago
Campbell Stephen A, . 2005. Science and Engineering of Microelectronic Fabrication. New York: OUP.
Harvard
Campbell S. A., . (2005). Science and Engineering of Microelectronic Fabrication. New York: OUP.
MLA
Campbell Stephen A, . Science and Engineering of Microelectronic Fabrication. New York: OUP. 2005.